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APIC celebrates 40 years

โœ Scribed by Michelle R. Farber


Book ID
119184571
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
116 KB
Volume
40
Category
Article
ISSN
1527-3296

No coin nor oath required. For personal study only.


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Sealing Technology 5 from seal erosion and compression set caused seal issues in IMD and STI processes. The scheduled maintenance cycle was 90 days but premature sealing issues occurred within 30-60 days. The incumbent O-ring performance issues were related to mechanical as well as chemical attack w