Antibacterial effect of acrylic dental devices after surface modification by fluorine and silver dual-ion implantation

Study of structure and surface modificat

Study of structure and surface modification of silicon-on-insulator (SOI) devices synthesized by dual ion implantation

✍ Rucha H. Polji; A.D. Yadav; S.K. Dubey; P. Kumar; D. Kanjilal 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 683 KB

Silicon oxynitride (Si x O y N z ) buried layers were synthesized by high fluence (≥ 1 × 10 17 ions-cm -2 ) ion implantation of O + and N + sequentially into single crystal silicon at 150 keV to produce silicon-on-insulator (SOI) structures. The structures of the SOI devices were analyzed by FTIR an