Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography

✍ Scribed by M. J. Lee; N. Y. Lee; J. R. Lim; J. B. Kim; M. Kim; H. K. Baik; Y. S. Kim

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 442 KB
• Volume: 18
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200601268