Antenna-coupled polycrystalline silicon air-bridge thermal detector for mid-infrared radiation

✍ Scribed by Chong, N.; Ahmed, H.

• Book ID: 121005823
• Publisher: American Institute of Physics
• Year: 1997
• Tongue: English
• Weight: 502 KB
• Volume: 71
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.119992