Anomalously high yield of doubly charged Si ions sputtered from cleaned Si surface by keV neutral Ar impact

✍ Scribed by N. Shinde; K. Morita; S.D. Dhole; D. Ishikawa

• Book ID: 114164965
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 265 KB
• Volume: 182
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)00667-x