Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence

✍ Scribed by V.N. Popok; R.I. Khaibullin; V.V. Bazarov; V.F. Valeev; V. Hnatowicz; A. Mackova; V.B. Odzhaev

• Book ID: 114165776
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 162 KB
• Volume: 191
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(02)00635-3