✦ LIBER ✦
Anomalous characteristics of platelet defects formed by zero angle tilt hydrogen implantation in silicon wafers
✍ Scribed by Qinghua Xiao; Hailing Tu
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 309 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1369-8001
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