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Anodic Oxidation of Cyclopropane Derivatives

✍ Scribed by Dipl.-Chem. Meinolf Klehr; Prof. Dr. Hans J. Schäfer


Publisher
John Wiley and Sons
Year
1975
Tongue
English
Weight
212 KB
Volume
14
Category
Article
ISSN
0044-8249

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Electrochemistry of Silicon || Anodic Ox
✍ Lehmann, Volker 📂 Article 📅 2002 🏛 Wiley-VCH Verlag GmbH ⚖ 358 KB 👁 2 views

## Silicon Oxidation Techniques One of the properties that makes silicon the elephant in the zoo of semiconducting materials used in microelectronic manufacturing is the superior dielectric properties of its oxide [So1]. An SiO 2 layer can be formed by a simple thermal oxidation process in a wet (