Anode Magnetron Enhanced DC Glow Discharge Processes for Plasma Surface Cleaning and Polymerization

✍ Scribed by Wei-Han Tao; Hirotsugu K. Yasuda

• Book ID: 110331600
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 166 KB
• Volume: 22
• Category: Article
• ISSN: 0272-4324
• DOI: 10.1023/a:1014855728109