Annealing treatment of amorphous silicon generated by single point diamond turning

✍ Scribed by Renato G. Jasinevicius; Paulo S. Pizani

• Book ID: 105851899
• Publisher: Springer
• Year: 2006
• Tongue: English
• Weight: 463 KB
• Volume: 34
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-006-0650-z