Annealing studies of B+ implanted 6HSiC by RBS and optical sub-gap spectroscopy

✍ Scribed by E. Wendler; A. Heft; W. Wesch; G. Peiter; H.H. Dunken

• Book ID: 114168821
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 615 KB
• Volume: 127-128
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(96)00953-6