✦ LIBER ✦
Annealing of ion-implanted silicon-on-insulator films using a scanned graphite strip heater
✍ Scribed by S.K. Banerjee; B. Lee; J.E. Baker; D.A. Reed; B.G. Streetman
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 393 KB
- Volume
- 115
- Category
- Article
- ISSN
- 0040-6090
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