✦ LIBER ✦
Annealing of implantation damage in integrated-circuit devices using an incoherent light source: R A Powell et al, J Vac Sci Technol, 20 (1), 1982, 33–36
- Book ID
- 103462602
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 173 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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