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Annealing of chemically vapor deposited nanoscale Ti-Si islands on Si

โœ Scribed by T.I. Kamins; R. Stanley Williams; D.A.A. Ohlberg


Book ID
106019774
Publisher
Springer
Year
2005
Tongue
English
Weight
322 KB
Volume
80
Category
Article
ISSN
1432-0630

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