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Annealing environment effects in solid-phase epitaxial regrowth of Fe-implanted Al2O3

✍ Scribed by J.C. McCallum; C.W. White; P.S. Sklad; C.J. McHargue


Book ID
113281097
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
857 KB
Volume
46
Category
Article
ISSN
0168-583X

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