✦ LIBER ✦
Annealing Effect on Enlargement of Grain Size in Nanocrystalline Silicon Films Deposited by Silicon Evaporation with Oxygen and Argon Radicals
✍ Scribed by Nakamura, Kazuhiro; Hirata, Makoto; Yokota, Katsuhiro
- Book ID
- 121474871
- Publisher
- Institute of Pure and Applied Physics
- Year
- 2005
- Tongue
- English
- Weight
- 135 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0021-4922
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