Annealing behaviour of extremely low energy beryllium implantation into Ga0.47In0.53As: G Fernholz et al, Thin Solid Films, 156, 1988, 239–242

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 149 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90862-2