✦ LIBER ✦
Annealing behavior of defects introduced in SOI structure by arsenic ion implantation (ESR and PAS studies)
✍ Scribed by Akinori Suzuki; Hideki Nakamura; Tomio Izumi; Takayuki Onda; Tohru Hara
- Book ID
- 114194335
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 483 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0254-0584
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