✦ LIBER ✦
Anisotropic carrier transport in preferentially oriented polycrystalline silicon films fabricated by very-high-frequency plasma enhanced chemical vapor deposition using fluorinated source gas
✍ Scribed by K Nakahata; T Kamiya; C.M Fortmann; I Shimizu; H Stuchlı́ková; A Fejfar; J Kočka
- Book ID
- 117150255
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 184 KB
- Volume
- 266-269
- Category
- Article
- ISSN
- 0022-3093
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