Anisotropic and Smooth Inductively Coupled Plasma Etching of III-V Laser Waveguides Using HBr-O[sub 2] Chemistry

✍ Scribed by Bouchoule, S.; Azouigui, S.; Guilet, S.; Patriarche, G.; Largeau, L.; Martinez, A.; Le Gratiet, L.; Lemaitre, A.; Lelarge, F.

• Book ID: 121665483
• Publisher: The Electrochemical Society
• Year: 2008
• Tongue: English
• Weight: 726 KB
• Volume: 155
• Category: Article
• ISSN: 0013-4651
• DOI: 10.1149/1.2965790