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Angular resolved energy distribution of secondary ions emitted from a silicon target sputtered by rare gas ions under oblique incidence

✍ Scribed by Claude Pellet; Christian Schwebel; Corinne Resseguier


Book ID
113284401
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
881 KB
Volume
78
Category
Article
ISSN
0168-583X

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