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Angular distribution of sputtered particles induced by ion bombardment

✍ Scribed by Chin Shuang Lee; Ya Chun Liu; Yung Hung Chen; Shyong Lee


Book ID
113822886
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
303 KB
Volume
219-220
Category
Article
ISSN
0168-583X

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