✦ LIBER ✦
Angular characteristics of argon ion fluxes at the rf-powered electrode of a parallel-plate reactor
✍ Scribed by Karla Börnig; Joachim Janes
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 766 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0167-9317
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