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Angular and energy dependencies of secondary ion emission from polycrystalline and single-crystal surfaces

✍ Scribed by A.A. Kosyachkov

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
260 KB
Volume
42
Category
Article
ISSN
0042-207X

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Oxygen ions with energy in the range 4-15 keV O' were used to synthesize surface oxide layers by bombarding Si samples at di †erent angles of incidence with respect to the surface normal. High-resolution Rutherford backscattering spectroscopy and channelling were used to determine both the stoichiom