Angle-resolved photoelectron spectroscopy study on interfacial transition layer and oxidation-induced residual stress in Si(100) substrate near the interface

✍ Scribed by Suwa, Tomoyuki; Teramoto, Akinobu; Nagata, Kohki; Ogura, Atsushi; Nohira, Hiroshi; Muro, Takayuki; Kinoshita, Toyohiko; Sugawa, Shigetoshi; Ohmi, Tadahiro; Hattori, Takeo

• Book ID: 123385009
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 756 KB
• Volume: 109
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2013.03.004