Analytical model of squeeze film damping for microelectromechanical systems structures with anti-stiction raised strips

✍ Scribed by Zhuoqing Yang; Guifu Ding; Zhenwei Zhou; Haogang Cai; Xiaolin Zhao

• Book ID: 114461450
• Publisher: The Institution of Engineering and Technology
• Year: 2010
• Tongue: English
• Weight: 423 KB
• Volume: 5
• Category: Article
• ISSN: 1750-0443
• DOI: 10.1049/mnl.2010.0067