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Analytical characterization of thin carbon films

✍ Scribed by R. Ohr; C. Schug; M. Wahl; A. Wienss; H. Hilgers; J. Mahrholz; P. Willich; T. Jung


Book ID
105887981
Publisher
Springer
Year
2003
Tongue
English
Weight
216 KB
Volume
375
Category
Article
ISSN
1618-2650

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## Abstract Epitaxial siliconβ€”germanium (SiGe) thin films are being developed for a number of interesting applications. Potential uses include applications as fabrication layers for heterojunction bipolar transistor devices and a number of other novel electronic devices. For device applications, Si