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Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators

✍ Scribed by Zhe, Jiang; Wu, Xingtao; Cheng, Jin


Book ID
115500611
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
383 KB
Volume
14
Category
Article
ISSN
0960-1317

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