Analytical and experimental study of mismatch strain-induced microcantilever behavior during deposition

✍ Scribed by Sang-Hyun Kim; James G. Boyd

• Book ID: 105655408
• Publisher: Springer-Verlag
• Year: 2007
• Tongue: English
• Weight: 360 KB
• Volume: 21
• Category: Article
• ISSN: 1738-494X
• DOI: 10.1007/bf02916302