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ANALYTICAL AND EXPERIMENTAL MODAL ANALYSIS FOR OPERATIONAL VALIDATION AND CALIBRATION OF A MINIATURE SILICON SENSOR

✍ Scribed by P.Q. Zhang; X.L. Tang; B.X. Shan; J.A. Brandon; A.S.K. Kwan


Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
224 KB
Volume
214
Category
Article
ISSN
0022-460X

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✦ Synopsis


The development of micromechanical sensors poses new challenges in design, calibration and operation. The paper reports a study where analytical and experimental techniques are applied to a prototype sensor. Analytically, a substructuring method is used together with a proprietary finite element package. Experimentally, novel excitation and response transducers are used to provide input data for specialised time domain identification algorithms. The resulting comparisons provide confidence in the combination of techniques used in the study.