Analysis on nanoparticle growth by coagulation in silane plasma reactor

✍ Scribed by Dong-Joo Kim; Kyo-Seon Kim

• Book ID: 101433236
• Publisher: American Institute of Chemical Engineers
• Year: 2002
• Tongue: English
• Weight: 250 KB
• Volume: 48
• Category: Article
• ISSN: 0001-1541
• DOI: 10.1002/aic.690481109

✦ Synopsis

Abstract

The particle growth in a silane plasma reactor by coagulation between particles was analyzed by using a discrete‐sectional model, considering effects of a particle charge distribution based on the Gaussian distribution function. At the start of the plasma discharge, there is the high concentration of small‐size particles, and later large‐size particles appear and grow by coagulation between small‐size particles. Some fractions of small‐size particles are in a neutral state or even charged positively. The positively charged small‐size particles coagulate faster and more selectively with large‐size particles, which are charged more negatively than with medium‐size particles. Also, the particle‐size distribution in a plasma reactor becomes bimodal and large‐size particles become quite monodisperse. As the mass generation rate of monomers increase or as the monomer diameter decreases, large‐size particles grow more quickly and the particle‐size distribution becomes bimodal earlier. The plasma reactor can be a good candidate to produce monodisperse, nanosized particles.