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Analysis of two-dimensional anisotropic regions by affine and conformal mappings

✍ Scribed by Terakado, R.; Sakakibara, T.

Book ID
119814915
Publisher
IEEE
Year
1987
Tongue
English
Weight
269 KB
Volume
75
Category
Article
ISSN
0018-9219

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## Abstract In this paper, a methodology is proposed for expediting the coupled electro‐mechanical two‐dimensional finite element modeling of electrostatically actuated MEMS. The proposed methodology eliminates the need for repeated finite element meshing and subsequent electrostatic modeling of th