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Analysis of traps in CVD diamond films through thermal depumping of nuclear detectors

✍ Scribed by Balducci, A. ;Marinelli, Marco ;Milani, E. ;Morgada, M. E. ;Pucella, G. ;Rodriguez, G. ;Tucciarone, A. ;Verona-Rinati, G. ;Angelone, M. ;Pillon, M.

Book ID: 105362765
Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 122 KB
Volume: 201
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200405165

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## Abstract The photosensitive, nominally undoped nanocrystalline diamond (NCD) films were grown on insulating substrates at a relatively low temperature below 600 °C. The NCD films were exposed to the hydrogen plasma and then briefly to the oxide plasma. This treatment significantly reduced the su