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Analysis of thin films arising from electron-, ion- and photon-beam-induced decomposition of Cr(CO)6 and Al(CH3)3

✍ Scribed by R.W. Bigelow; J.G. Black; C.B. Duke; W.R. Salaneck; H.R. Thomas


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
963 KB
Volume
94
Category
Article
ISSN
0040-6090

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