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Analysis of the Sub-surface Damage of mc- and cz-Si Wafers Sawn with Diamond-plated Wire

✍ Scribed by Buchwald, Rajko; Fröhlich, Kilian; Würzner, Sindy; Lehmann, Toni; Sunder, Kirsten; Möller, Hans Joachim


Book ID
123605706
Publisher
Elsevier
Year
2013
Weight
773 KB
Volume
38
Category
Article
ISSN
1876-6102

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