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Analysis of the Gas Phase by In Situ FTIR Spectrometry and Mass Spectrometry During the CVD of Pyrocarbon from Propane

✍ Scribed by Olivier Féron; Francis Langlais; Roger Naslain

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
533 KB
Volume
5
Category
Article
ISSN
0948-1907

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