✦ LIBER ✦
Analysis of the effects of reflectance and refraction generated by wafers made from fused silica, ALOxNy and TiSixNy under different light sources on pattern length and best focus
✍ Scribed by Yang-Kuao Kuo; Chuen-Guang Chao
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 382 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0026-2692
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