Analysis of surface layers by light ion back-scattering and sputtering combined with Auger Electron Spectroscopy (AES)

✍ Scribed by R. Behrisch; B.M.U. Scherzer; P. Staib

• Publisher: Elsevier Science
• Year: 1973
• Tongue: English
• Weight: 500 KB
• Volume: 19
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(73)90024-2