✦ LIBER ✦
Analysis of silicon nitride layers deposited from SiH4 and N2 on silicon : O. Meyer and W. Scherber. J. Phys. Chem. Solids32 (1971), p. 1909
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 110 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0026-2714
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