Analysis of Si crystal irradiated by highly-charged Ar ions using RBS-channeling technique

✍ Scribed by S. Momota; K. Nishimura; Y. Nojiri; M. Kashihara; T. Narusawa; F. Nishiyama

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 474 KB
• Volume: 267
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2009.01.054