✦ LIBER ✦
Analysis of semiconductor surfaces with very thin native oxide layers by combined immersion and multiple angle of incidence ellipsometry
✍ Scribed by Ivan Ohlídal; Frantis̆ek Lukes̆
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 972 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0169-4332
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