Analysis of microstructured samples by focused ion beam sample preparation: Frey, L.; Ergele, W.; Falter, T.; Gong, L.; Ryssel, H. Microelectronic Engineering. 1993 Apr; 21(1–4): 375–378

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 142 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90031-0