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Analysis of MEMS mechanical spring for coupling multimodal micro resonators sensor

โœ Scribed by Nor Hayati Saad; Raya K. Al-Dadah; Carl J. Anthony; Michael C.L. Ward

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
452 KB
Volume
86
Category
Article
ISSN
0167-9317

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๐Ÿ“œ SIMILAR VOLUMES

Comparison of generalized differential q
Comparison of generalized differential quadrature and Galerkin methods for the analysis of micro-electro-mechanical coupled systems
โœ Hamed Sadeghian; Ghader Rezazadeh ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 590 KB

This paper presents a comprehensive comparison study between the generalized differential quadrature (GDQ) and the well-known global Galerkin method for analysis of pull-in behavior of nonlinear micro-electro-mechanical coupled systems. The nonlinear governing integro-differential equation for doubl