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Analysis of magnetic field effect on 3D melt flow in CZ Si growth

✍ Scribed by N.G. Ivanov; A.B. Korsakov; E.M. Smirnov; K.V. Khodosevitch; V.V. Kalaev; Yu.N. Makarov; E. Dornberger; J. Virbulis; W. von Ammon

Book ID
108341829
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
349 KB
Volume
250
Category
Article
ISSN
0022-0248

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The flow in an oxide melt such as LiNbOj and TiO 2 in a high magnetic field was observed by using magnetic-field-applied Czochralski equipment for oxide crystals. It was found that the flows in oxides melts were very much different from these in a semiconductor melt. The single crystals of TiO~ we