𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Analysis of helium and hydrogen effect on RAFS by means of multi-beam electron microscope

✍ Scribed by Hashimoto, N.; Tanimoto, J.; Kubota, T.; Kinoshita, H.; Ohnuki, S.

Book ID
118115997
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
480 KB
Volume
442
Category
Article
ISSN
0022-3115

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

The lithographic effect of electron beam
The lithographic effect of electron beam on poly(methyl methacrylate) in a scanning electron microscope: Minimization of line width by the dose and beam current
✍ M. MuchovΓ‘; Z. Pelzbauer πŸ“‚ Article πŸ“… 1989 πŸ› John Wiley and Sons 🌐 English βš– 388 KB πŸ‘ 2 views

The lithographic effect of electron beam in line exposures in scanning electron micruicopy (SEM) on poly(methy1 methacrylate) (PMMA) was evaluated using the line width in a film deposited on a silicium substrate and from the line profiles in a PMMA plate. It was found that the effect of the dose on