Analysis of Grit Cut Depth in Fixed-Abrasive Diamond Wire Saw Slicing Single Crystal Silicon

✍ Scribed by Gao, Yu Fei; Ge, Pei Qi

• Book ID: 120555322
• Publisher: Trans Tech Publications, Ltd.
• Year: 2011
• Tongue: English
• Weight: 277 KB
• Volume: 175
• Category: Article
• ISSN: 1662-9779
• DOI: 10.4028/www.scientific.net/SSP.175.72