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Analysis of GeH4 and GeF4 as gaseous feed materials for germanium implantation

✍ Scribed by A Ferreiro; J du Port de Pontcharra; C Jaussad; E Lora-Tamayo

Book ID: 103473119
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 295 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90035-3

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