✦ LIBER ✦
Analysis of frequency responses for different rotor configurations of small turbomolecular pumps: F Casaro,J Vac Sci Technol,A6, 1988, 1192–1195
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 150 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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