Analysis of current-crowding effects in RF-MEMS spiral inductors by simple equivalent circuits
✍ Scribed by Zhang Yaojiang; Long Haibo; Feng Zhenghe
- Publisher
- John Wiley and Sons
- Year
- 2002
- Tongue
- English
- Weight
- 122 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
The metal loss of multiturn spiral inductors is known to increase dramatically under current‐crowding effects at high frequencies. An equivalent circuit is derived to simulate this current crowding, including skin and proximity effects. An efficient formula is derived to calculate self‐ and mutual coupling of currents in irregular hexahedrons. Possible approaches for the design of high‐Q RF‐MEMS spiral inductors are discussed. © 2002 Wiley Periodicals, Inc. Microwave Opt Technol Lett 33: 218–221, 2002; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.10280