Analysis of a-C:H superhard coatings by scanning Auger microscope and target factor analysis
β Scribed by R. Hauert; J. Patscheider; R. Zehringer; M. Tobler
- Book ID
- 103427614
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 446 KB
- Volume
- 206
- Category
- Article
- ISSN
- 0040-6090
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π SIMILAR VOLUMES
Bilayers of TiO 2 /Ti 3 Al and TiO 2 /TiAl were heated up to 973 K. The resulting concentration-depth profiles were determined using Auger electron spectroscopy in combination with ion sputtering. By applying targetfactor analysis it was possible to distinguish between different states of chemical b
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